WORKING INSTRUMENT AND CONTROL METHOD OF WORKING INSTRUMENT
PROBLEM TO BE SOLVED: To provide a working instrument equipped with a numerical control device and at least two numerically controlled movement axes to achieve super high precision working of l μm or less. SOLUTION: The working instrument 1 equipped with the numerical control device 3 and at least t...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a working instrument equipped with a numerical control device and at least two numerically controlled movement axes to achieve super high precision working of l μm or less. SOLUTION: The working instrument 1 equipped with the numerical control device 3 and at least two numerically controlled movement axes has detection means 13-15 for detecting an amount of change of the disturbance variation factor, analyzes the detection information detected by the detection means 13-15, determines whether or not the result does not meet the predetermined standard of the disturbance variation factor, and, when the result is determined that the standard of the disturbance variation factor is not met, stops the processing temporarily. COPYRIGHT: (C)2008,JPO&INPIT |
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