TEMPERATURE CONTROL DEVICE FOR PLANAR WORKPIECE AND TEMPERATURE CONTROL METHOD

PROBLEM TO BE SOLVED: To provide a temperature control device for a planar workpiece, the device capable of easily and simultaneously controlling a plurality of planar workpieces which are to be subjected to precision processing and disposed at a predetermined interval, and easily destaticizing elec...

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Bibliographische Detailangaben
Hauptverfasser:	OTA KOICHI, TERAJIMA MASATOSHI, ASANUMA KAZUNORI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FREQUENCY-CHANGING HOLOGRAPHY MATERIALS THEREFOR NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a temperature control device for a planar workpiece, the device capable of easily and simultaneously controlling a plurality of planar workpieces which are to be subjected to precision processing and disposed at a predetermined interval, and easily destaticizing electrostatic charges in the workpieces. SOLUTION: The temperature control device is equipped with: a rack 10 as a stacking means to stack glass plates 16 as a plurality of planar workpieces to be subjected to precision processing, at a predetermined interval and parallel to one another to form a stacked body; an air supply unit 20 as an air flow supply means to supply an air flow over the entire face at one end of the stacked body so as to produce an air flow as parallel streams along both surfaces of each glass plate 16; a temperature control means composed of a heat exchanger 32 and a heater 30 to control the air flow to a predetermined temperature; and further a destaticizing device between the rack 10 and the air flow supply unit 20 to remove electrostatic charges in each glass plate 16. COPYRIGHT: (C)2008,JPO&INPIT