PLATING METHOD AND METHOD FOR PRODUCING MICRODEVICE

PROBLEM TO BE SOLVED: To provide a plating method for forming plating patterns of a plurality of layers without complicating an operation so that each layer has almost the same composition. SOLUTION: Since the total area of a resist pattern 13, the total area of a resist pattern 17 and the total are...

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Bibliographische Detailangaben
Hauptverfasser: MIYATA SHINGO, HORIUCHI SOHEI, OTSUBO YUJI, UEJIMA SATOSHI, YAMAGUCHI ATSUSHI, SAITO MASAHIRO
Format: Patent
Sprache:eng
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