MANUFACTURING METHOD OF CYLINDER TYPE CAPACITOR UTILIZING AMORPHOUS CARBON LAYER

PROBLEM TO BE SOLVED: To provide a manufacturing method of a capacitor of a semiconductor device capable of preventing a bridge phenomenon between adjacent storage nodes in a wet dip-out process, even if the height of a cylinder is made high. SOLUTION: The method includes the steps of: forming an is...

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Bibliographische Detailangaben

Hauptverfasser:	YEOM SEUNG JIN, BOKU KIZEN, KIL DEOK-SIN, SO KANSO, KIM JIN-HYOCK, LEE KI-JUNG, RO SAISEI
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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