PRESSURE SENSOR

PROBLEM TO BE SOLVED: To detect very low pressure with excellent sensitivity, as to a pressure sensor with electrodes formed on main faces of a surface and a reverse face of a piezoelectric material. SOLUTION: At least the two faces receiving pressure of sensor elements in the pressure sensor are la...

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Hauptverfasser: KONO SHUICHI, OUTSUKA HIDEO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To detect very low pressure with excellent sensitivity, as to a pressure sensor with electrodes formed on main faces of a surface and a reverse face of a piezoelectric material. SOLUTION: At least the two faces receiving pressure of sensor elements in the pressure sensor are layered in this pressure sensor, of the present invention, with the electrodes formed on the main faces of the surface and the reverse face of the piezoelectric material, and respective electrode wires of the sensor elements are connected in parallel to solve the problem hereinbefore to be solved. COPYRIGHT: (C)2008,JPO&INPIT