AIR COMPONENT SUPPLY DEVICE
PROBLEM TO BE SOLVED: To provide an air component supply device for supplying air shells to a plurality of spots, while preventing the device from becoming larger in size. SOLUTION: If a face position Ps is above a reference position Pd (if it is determined to be above in step S50), a temperature in...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an air component supply device for supplying air shells to a plurality of spots, while preventing the device from becoming larger in size. SOLUTION: If a face position Ps is above a reference position Pd (if it is determined to be above in step S50), a temperature in a chamber Tc is required to be higher than a calculated air shell temperature Ta (Yes in step S70). A Pertier element 140 is operated in the overheat mode (step S80). On the other hand, if the face position Ps is below the reference position Pd (if it is determined to be below in step S50), the temperature in the chamber Tc is required to be lower than the calculated air shell temperature Ta (Yes in step S100). The Peltier element 140 is operated in the cooling mode (step S110). COPYRIGHT: (C)2008,JPO&INPIT |
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