CERIUM-BASED ABRASIVE SLURRY AND METHOD FOR PRODUCING CERIUM-BASED ABRASIVE SLURRY

PROBLEM TO BE SOLVED: To provide a cerium-based abrasive slurry which is excellent in abrasive force and abrasive accuracy and does not adhere abrasive particles to abraded surfaces, after abraded, and to provide a method for producing the cerium-based abrasive slurry. SOLUTION: This cerium-based ab...

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Bibliographische Detailangaben
Hauptverfasser:	USHIYAMA KAZUYA, UCHINO YOSHIJI
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM,CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THERARE-EARTH METALS DRESSING OR CONDITIONING OF ABRADING SURFACES DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING INORGANIC CHEMISTRY MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NANOTECHNOLOGY NATURAL RESINS PAINTS PERFORMING OPERATIONS POLISHES POLISHING SEMICONDUCTOR DEVICES SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a cerium-based abrasive slurry which is excellent in abrasive force and abrasive accuracy and does not adhere abrasive particles to abraded surfaces, after abraded, and to provide a method for producing the cerium-based abrasive slurry. SOLUTION: This cerium-based abrasive slurry which contains cerium-based abrasive particles having a total rare earth element oxide (TREO) content of 95 wt.% is characterized in that the cerium-based abrasive particles have a fluorine content of