DURABLE GRAPHITE CONNECTOR AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To extend the life of a graphite component such as a connection post for heater and further improve strength thereof without damaging characteristics inherent in a graphite such as superior electrical conductivity and thermal shock resistance. SOLUTION: The graphite component o...

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Hauptverfasser:	HEIL TIMOTHY J, LU ZHONG-HAO, LONGWORTH DOUGLAS A, LIU XIANG
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To extend the life of a graphite component such as a connection post for heater and further improve strength thereof without damaging characteristics inherent in a graphite such as superior electrical conductivity and thermal shock resistance. SOLUTION: The graphite component of an article is coated with a pyrolytic graphite (pG), so that mechanical strength is higher than an uncoated graphite component at least by 25%. In use application of connector such as a heater used for a semiconductor process assembly, a pG coating constituent is over-coated with at least a protective layer 9 of electric insulating material. In such a case, a part of the pG coating graphite component is exposed to form an electric connection part to the assembly (not coated with the protective layer). COPYRIGHT: (C)2008,JPO&INPIT