SENSOR DEVICE

PROBLEM TO BE SOLVED: To provide a sensor device for suppressing changes in the electrical characteristics of a sensor device that are caused by the residual stress of a protective film. SOLUTION: A magnetic sensor comprises a substrate, magnetoresistive elements 31 provided on the substrate, and a passivation film 60 provided on the substrate as a whole so as to cover the magnetoresistive elements 31. The magnetic sensor detects physical changes as changes in the electrical signals converted through each of magnetoresistive elements 31. Openings 61, 62, 63, 64 that open upward are provided on a part of the passivation film 60. The openings 61, 62, 63, 64 are a shape, combined with at least one of a linear line and a curved line, when viewed from the upper side; and the angle formed with the linear line and the curved line intersected is made an obtuse angle, when there is a mutually intersected part. COPYRIGHT: (C)2008,JPO&INPIT