GAS TRANSFERRING PUMP AND DETECTION SENSOR

PROBLEM TO BE SOLVED: To provide a technology capable of precisely transferring even a very small amount of gas and offering high reliability. SOLUTION: A gas transferring pump is equipped with a flow passage, which comprises a chamber section 12, an inlet side channel 13, an outlet side channel 14,...

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Bibliographische Detailangaben
Hauptverfasser: MIHARA TAKASHI, IKEHARA TAKESHI, HEISIG SVEN, MANZONI GIULIO
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a technology capable of precisely transferring even a very small amount of gas and offering high reliability. SOLUTION: A gas transferring pump is equipped with a flow passage, which comprises a chamber section 12, an inlet side channel 13, an outlet side channel 14, a tapered inlet side diffuser section 15 and a tapered outlet side diffuser 16, and a heater 20 and is adapted to surely transfer the gas from the inlet side channel 13 to the outlet side channel 14 by expanding and contracting the gas in the chamber section 12 with the heater 20 to cause a volume change. The heater 20 provided in the chamber section 12 is in a zigzag shape in which a straight portion 20a and a folded portion 20b are alternately continued and the maximum width of the folded portion 20b is set to be larger than the straight portion 20a. COPYRIGHT: (C)2008,JPO&INPIT