CLEANING METHOD BY STERILIZATION OR PARTICLE REMOVAL, AND APPARATUS USED THEREFOR

PROBLEM TO BE SOLVED: To provide a new method for demonstrating sufficient cleaning effect without using any chemical, and an apparatus therefor. SOLUTION: This method is for cleaning a treating object by sterilization or particle removal using water containing a hydrogen radical and/or a carbon rad...

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Bibliographische Detailangaben
Hauptverfasser: YANAI NAOKI, TANAKA TADAKURO, SHIOMI MOTONOBU, SENZAKI YUKI, ARAKI SHOGO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a new method for demonstrating sufficient cleaning effect without using any chemical, and an apparatus therefor. SOLUTION: This method is for cleaning a treating object by sterilization or particle removal using water containing a hydrogen radical and/or a carbon radical. The cleaning apparatus by sterilization or particle removal is provided with a treatment tank for washing the treating object by sterilization or particle removal, and a means for supplying water containing a hydrogen radical and/or carbon radical to the treatment tank. COPYRIGHT: (C)2008,JPO&INPIT