PATTERN INSPECTION METHOD AND ITS DEVICE

PROBLEM TO BE SOLVED: To provide a pattern inspection method and its device by which a target pattern is easily detected even if the size of the target pattern is small. SOLUTION: When the target pattern 103 of an inspection object is detected from an image 101 of an observation field of view of the...

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Hauptverfasser:	KIMURA YOSHIHIRO, NISHIHAMA HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a pattern inspection method and its device by which a target pattern is easily detected even if the size of the target pattern is small. SOLUTION: When the target pattern 103 of an inspection object is detected from an image 101 of an observation field of view of the inspection object, an image 102 of an observation field of view broader than that of the inspection object is previously obtained, and the target pattern is detected from the obtained image, and then the target pattern is inspected in a specified resolution. By such a method, a probability of the target pattern not coming in the field of view is decreased since the image has the broad observation field of view. COPYRIGHT: (C)2008,JPO&INPIT