METHOD AND APPARATUS FOR MANUFACTURING COLD MIRROR

PROBLEM TO BE SOLVED: To provide a method and apparatus for manufacturing a cold mirror having excellent illuminance, heat resistance and durability and facilitating the control of vapor deposition rate and film thickness. SOLUTION: The cold mirror is manufactured by sputtering two or more kinds of...

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Bibliographische Detailangaben
Hauptverfasser:	IDE YOSHIO, ITO HIDENORI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method and apparatus for manufacturing a cold mirror having excellent illuminance, heat resistance and durability and facilitating the control of vapor deposition rate and film thickness. SOLUTION: The cold mirror is manufactured by sputtering two or more kinds of sputtering materials each having different refractive index respectively in a separated film deposition zone while introducing oxidation reactive gas and a sputtering gas to deposit oxide films each having different refractive index on the surface of a processed material. COPYRIGHT: (C)2008,JPO&INPIT