CLEANING OF POLLUTED GOODS BY SUPERCRITICAL WATER OXIDIZATION

PROBLEM TO BE SOLVED: To provide a method to remove polluting materials by letting goods which have been polluted in microscopic dimensions among circuit arrangements, contact with a reactant cleaning fluid containing water and oxidization materials. SOLUTION: The method to remove polluting materials at critical or supercritical temperatures of the reactant cleaning fluid and at critical or supercritical pressures of the same comprises the removal of polluting materials from polluted goods that includes a process to let the polluted goods contact with the reactant cleaning fluid containing water 19 and oxide materials 51, and the removal of polluting materials through the oxidization of at least part of the polluting materials, the oxidization to generate an admixture containing unreacted reactant cleaning fluid and the removed polluting materials, and the separation of the cleaned goods from the generated admixture. COPYRIGHT: (C)2008,JPO&INPIT