METHOD FOR PRODUCING SUPERCONDUCTING THIN FILM

PROBLEM TO BE SOLVED: To solve the problem that the main burning which is a crystallization step takes a long time in a coating pyrolysis method which is one of the methods for producing a superconducting thin film. SOLUTION: In the coating pyrolysis method, a coating film 3 containing the constituent element of a superconductor is formed on the upper layer of a substrate 1. Further, a surface side seed material layer 4 is formed on the surface side of the coating film 3 to perform temporary burning and main burning. During the main burning, crystallization is performed towards the surface from the substrate 1 side, and crystallization is also performed towards the substrate side from the surface side seed material layer 4. As a result, the time required for crystallization is shortened by performing crystallization from both directions. Furthermore, it is desirable to form a buffer layer 2 between the substrate 1 and the coating film 3. The buffer layer 2 prevents the chemical reaction of the substrate 1 with the coating film 3 and functions as a seed for crystallization. COPYRIGHT: (C)2008,JPO&INPIT