APPARATUS FOR FORMING DEPOSITION FILM

PROBLEM TO BE SOLVED: To stably manufacture an electrophotographic photoreceptor superior in characteristics, at a low cost. SOLUTION: The apparatus for forming a deposition film has a reaction vessel 100 which can be vacuum sealed and a cylindrical discharge electrode 101. The reaction vessel 100 has a plurality of cylindrical substrates 107 arranged in the inner part. The discharge electrode 101 composes the side wall of the reaction vessel 100 and surrounds the plurality of the cylindrical substrates 107. The apparatus can form a deposition film on the plurality of cylindrical substances 107 by applying a high-frequency power to the discharge electrodes 101, and generating glow discharge in the reaction vessel 100 to decompose a source gas introduced into the reaction vessel 100. Each cylindrical substrate 107 is grounded through a rotation shaft 108. The apparatus also has partition plates 111 which are electrically connected to the discharge electrode 101 placed between the respective cylindrical substrates 107, and prevent surfaces to be film-formed of the cylindrical substances 107 from directly facing to each other. The partition plate 111 has an exhaust port 113 and composes one part of an exhaust section. COPYRIGHT: (C)2008,JPO&INPIT