ADSORPTION PAT AND SUBSTRATE TREATMENT DEVICE

PROBLEM TO BE SOLVED: To provide each adsorption pat capable of preventing the sticking of foreign matter which is not desired on the surface of a substrate upon desorption of the substrate in a substrate treatment method where only the surface of the substrate is treated with a chemical, and to pro...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KIDO SHIGERU
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS SEMICONDUCTOR DEVICES
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