COATING METHOD AND DEVICE
PROBLEM TO BE SOLVED: To provide a coating method and device, wherein the quality of a coating film is prevented from becoming unstable due to volatilization of the coating liquid. SOLUTION: The coating device 10 is provided with: a coating head 36 for applying the coating liquid to a support; coati...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a coating method and device, wherein the quality of a coating film is prevented from becoming unstable due to volatilization of the coating liquid. SOLUTION: The coating device 10 is provided with: a coating head 36 for applying the coating liquid to a support; coating liquid supply lines 56, 58 for circularly supplying the coating liquid to the coating head 36; supply pumps 66, 68; coating liquid circulation lines 60, 62; a cover member 80 for covering a coating liquid discharge part where the coating liquid is discharged upward for the coating head 36; and a moving cover member 90 for covering the coating head 36 of a preparatory state of coating work. COPYRIGHT: (C)2008,JPO&INPIT |
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