MANUFACTURING METHOD FOR LIQUID DROPLET EJECTION HEAD AND LIQUID DROPLET EJECTION HEAD

PROBLEM TO BE SOLVED: To efficiently work a flow passage and a pressure chamber in a flow passage plate. SOLUTION: A void part 32 and a hole part 34 are formed inside of a transparent substrate 26 by condensing a laser beam ejected from a laser beam source 28 into the transparent substrate 26. The void part 32 and the hole part 34 are etched and enlarged by an etching liquid by supplying the etching liquid from the hole part 34, whereby the pressure chamber and the passage are formed. The void part 32 and the hole part 34 in which the etching liquid flows are formed inside of the transparent substrate 26 by the laser beam, and the void part 32 and the hole part 34 are enlarged by etching. The pressure chamber, a diaphragm and the passage are thereby worked in the transparent substrate 26 without decreasing the working efficiency. COPYRIGHT: (C)2008,JPO&INPIT