SUBSTRATE CASSETTE

PROBLEM TO BE SOLVED: To provide a substrate cassette capable of sufficiently suppressing the bending of a substrate even for holding a large-size glass substrate called as the eighth generation. SOLUTION: The substrate cassette 12 has support bars 20 each arranged for housing a plurality of substra...

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Bibliographische Detailangaben
Hauptverfasser:	MARUYAMA YUICHI, TOKI TERUKAZU, YUASA ICHIRO, FUKATSU ISAO
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a substrate cassette capable of sufficiently suppressing the bending of a substrate even for holding a large-size glass substrate called as the eighth generation. SOLUTION: The substrate cassette 12 has support bars 20 each arranged for housing a plurality of substrates in a multiple stages in a vertical direction with a horizontal posture and supporting them so as to suppress the center of each of the substrates. The substrate cassette 12 is provided with a vertical direction adjusting mechanism for adjusting vertical distortion of the support bars 20, between a frame formed on the back surface oppositely to a substrate carrying-in side and the support bars 20. COPYRIGHT: (C)2008,JPO&INPIT