CHARGED PARTICLE BEAM DETECTING DEVICE

CHARGED PARTICLE BEAM DETECTING DEVICE

PROBLEM TO BE SOLVED: To provide a charged particle beam detecting device capable of preventing deterioration of a detector such as MCP caused by plasma generated in cleaning. SOLUTION: A plurality sheets of meshes are installed at a front face of a detection face such as the MCP, positive and negat...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: JINRIKI TAKENORI, NAKAMURA NAOYUKI, WATANABE YASUYUKI, NITTA JUN, ANAZAWA NORIMICHI, YONEZAWA AKIRA
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator JINRIKI TAKENORI
NAKAMURA NAOYUKI
WATANABE YASUYUKI
NITTA JUN
ANAZAWA NORIMICHI
YONEZAWA AKIRA
description PROBLEM TO BE SOLVED: To provide a charged particle beam detecting device capable of preventing deterioration of a detector such as MCP caused by plasma generated in cleaning. SOLUTION: A plurality sheets of meshes are installed at a front face of a detection face such as the MCP, positive and negative voltages are applied to this plurality sheets of meshes in cleaning by the plasma so that none of the particles having a positive charge and a negative charge in the plasma is prevented from reaching the detector such as the MCP, and furthermore a neutral particle in the plasma is prevented from reaching the detecting face such as the MCP while the meshes are made not to be overlapped. COPYRIGHT: (C)2008,JPO&INPIT
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2007280737A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2007280737A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2007280737A3</originalsourceid><addsrcrecordid>eNrjZFBz9nAMcnd1UQhwDArxdPZxVXBydfRVcHENcXUO8fRzB7LCPJ1deRhY0xJzilN5oTQ3g5Kba4izh25qQX58anFBYnJqXmpJvFeAkYGBuZGFgbmxuaMxUYoA4MYjpw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>CHARGED PARTICLE BEAM DETECTING DEVICE</title><source>esp@cenet</source><creator>JINRIKI TAKENORI ; NAKAMURA NAOYUKI ; WATANABE YASUYUKI ; NITTA JUN ; ANAZAWA NORIMICHI ; YONEZAWA AKIRA</creator><creatorcontrib>JINRIKI TAKENORI ; NAKAMURA NAOYUKI ; WATANABE YASUYUKI ; NITTA JUN ; ANAZAWA NORIMICHI ; YONEZAWA AKIRA</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a charged particle beam detecting device capable of preventing deterioration of a detector such as MCP caused by plasma generated in cleaning. SOLUTION: A plurality sheets of meshes are installed at a front face of a detection face such as the MCP, positive and negative voltages are applied to this plurality sheets of meshes in cleaning by the plasma so that none of the particles having a positive charge and a negative charge in the plasma is prevented from reaching the detector such as the MCP, and furthermore a neutral particle in the plasma is prevented from reaching the detecting face such as the MCP while the meshes are made not to be overlapped. COPYRIGHT: (C)2008,JPO&amp;INPIT</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2007</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20071025&amp;DB=EPODOC&amp;CC=JP&amp;NR=2007280737A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20071025&amp;DB=EPODOC&amp;CC=JP&amp;NR=2007280737A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>JINRIKI TAKENORI</creatorcontrib><creatorcontrib>NAKAMURA NAOYUKI</creatorcontrib><creatorcontrib>WATANABE YASUYUKI</creatorcontrib><creatorcontrib>NITTA JUN</creatorcontrib><creatorcontrib>ANAZAWA NORIMICHI</creatorcontrib><creatorcontrib>YONEZAWA AKIRA</creatorcontrib><title>CHARGED PARTICLE BEAM DETECTING DEVICE</title><description>PROBLEM TO BE SOLVED: To provide a charged particle beam detecting device capable of preventing deterioration of a detector such as MCP caused by plasma generated in cleaning. SOLUTION: A plurality sheets of meshes are installed at a front face of a detection face such as the MCP, positive and negative voltages are applied to this plurality sheets of meshes in cleaning by the plasma so that none of the particles having a positive charge and a negative charge in the plasma is prevented from reaching the detector such as the MCP, and furthermore a neutral particle in the plasma is prevented from reaching the detecting face such as the MCP while the meshes are made not to be overlapped. COPYRIGHT: (C)2008,JPO&amp;INPIT</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2007</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFBz9nAMcnd1UQhwDArxdPZxVXBydfRVcHENcXUO8fRzB7LCPJ1deRhY0xJzilN5oTQ3g5Kba4izh25qQX58anFBYnJqXmpJvFeAkYGBuZGFgbmxuaMxUYoA4MYjpw</recordid><startdate>20071025</startdate><enddate>20071025</enddate><creator>JINRIKI TAKENORI</creator><creator>NAKAMURA NAOYUKI</creator><creator>WATANABE YASUYUKI</creator><creator>NITTA JUN</creator><creator>ANAZAWA NORIMICHI</creator><creator>YONEZAWA AKIRA</creator><scope>EVB</scope></search><sort><creationdate>20071025</creationdate><title>CHARGED PARTICLE BEAM DETECTING DEVICE</title><author>JINRIKI TAKENORI ; NAKAMURA NAOYUKI ; WATANABE YASUYUKI ; NITTA JUN ; ANAZAWA NORIMICHI ; YONEZAWA AKIRA</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2007280737A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2007</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>JINRIKI TAKENORI</creatorcontrib><creatorcontrib>NAKAMURA NAOYUKI</creatorcontrib><creatorcontrib>WATANABE YASUYUKI</creatorcontrib><creatorcontrib>NITTA JUN</creatorcontrib><creatorcontrib>ANAZAWA NORIMICHI</creatorcontrib><creatorcontrib>YONEZAWA AKIRA</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>JINRIKI TAKENORI</au><au>NAKAMURA NAOYUKI</au><au>WATANABE YASUYUKI</au><au>NITTA JUN</au><au>ANAZAWA NORIMICHI</au><au>YONEZAWA AKIRA</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CHARGED PARTICLE BEAM DETECTING DEVICE</title><date>2007-10-25</date><risdate>2007</risdate><abstract>PROBLEM TO BE SOLVED: To provide a charged particle beam detecting device capable of preventing deterioration of a detector such as MCP caused by plasma generated in cleaning. SOLUTION: A plurality sheets of meshes are installed at a front face of a detection face such as the MCP, positive and negative voltages are applied to this plurality sheets of meshes in cleaning by the plasma so that none of the particles having a positive charge and a negative charge in the plasma is prevented from reaching the detector such as the MCP, and furthermore a neutral particle in the plasma is prevented from reaching the detecting face such as the MCP while the meshes are made not to be overlapped. COPYRIGHT: (C)2008,JPO&amp;INPIT</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_JP2007280737A
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title CHARGED PARTICLE BEAM DETECTING DEVICE
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-06T19%3A09%3A45IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=JINRIKI%20TAKENORI&rft.date=2007-10-25&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2007280737A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true