CHARGED PARTICLE BEAM DETECTING DEVICE

PROBLEM TO BE SOLVED: To provide a charged particle beam detecting device capable of preventing deterioration of a detector such as MCP caused by plasma generated in cleaning. SOLUTION: A plurality sheets of meshes are installed at a front face of a detection face such as the MCP, positive and negat...

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Bibliographische Detailangaben
Hauptverfasser:	JINRIKI TAKENORI, NAKAMURA NAOYUKI, WATANABE YASUYUKI, NITTA JUN, ANAZAWA NORIMICHI, YONEZAWA AKIRA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a charged particle beam detecting device capable of preventing deterioration of a detector such as MCP caused by plasma generated in cleaning. SOLUTION: A plurality sheets of meshes are installed at a front face of a detection face such as the MCP, positive and negative voltages are applied to this plurality sheets of meshes in cleaning by the plasma so that none of the particles having a positive charge and a negative charge in the plasma is prevented from reaching the detector such as the MCP, and furthermore a neutral particle in the plasma is prevented from reaching the detecting face such as the MCP while the meshes are made not to be overlapped. COPYRIGHT: (C)2008,JPO&INPIT