METHOD AND APPARATUS FOR INSPECTING SUBSTRATE, AND METHOD AND APPARATUS FOR REPAIRING SUBSTRATE
PROBLEM TO BE SOLVED: To accurately and appropriately index a position on a substrate at a short-circuiting section extremely quickly without causing any complexity, or the like in work, when inspecting the short-circuiting of a plurality of electrode patterns formed on the substrate. SOLUTION: If a...
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| creator | OKAJI KUNIO FUJIKAWA JUNJI |
| description | PROBLEM TO BE SOLVED: To accurately and appropriately index a position on a substrate at a short-circuiting section extremely quickly without causing any complexity, or the like in work, when inspecting the short-circuiting of a plurality of electrode patterns formed on the substrate. SOLUTION: If a prescribed current flows when executing a voltage application process for bringing a plurality of probes 4 in a probe tool 5 into contact with one edge of a plurality of electrode patterns 3 formed in a stripe on a glass substrate 2 for successively applying voltage between adjacent probes 4, a position in an electrode pattern arrangement direction Y on the glass substrate 2 at a short-circuiting section 3a is obtained, based on the electrode patterns 3 corresponding to the probe 4 where the flow of the current is detected, and a position in a direction X along the electrode pattern on the glass substrate 2 at the short-circuiting section 3a is obtained based on the level of the current value. COPYRIGHT: (C)2008,JPO&INPIT |
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SOLUTION: If a prescribed current flows when executing a voltage application process for bringing a plurality of probes 4 in a probe tool 5 into contact with one edge of a plurality of electrode patterns 3 formed in a stripe on a glass substrate 2 for successively applying voltage between adjacent probes 4, a position in an electrode pattern arrangement direction Y on the glass substrate 2 at a short-circuiting section 3a is obtained, based on the electrode patterns 3 corresponding to the probe 4 where the flow of the current is detected, and a position in a direction X along the electrode pattern on the glass substrate 2 at the short-circuiting section 3a is obtained based on the level of the current value. 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| subjects | ADVERTISING BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CRYPTOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DISPLAY DISPLAYING EDUCATION ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING LABELS OR NAME-PLATES MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS PRINTED CIRCUITS SEALS SIGNS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING |
| title | METHOD AND APPARATUS FOR INSPECTING SUBSTRATE, AND METHOD AND APPARATUS FOR REPAIRING SUBSTRATE |
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