PROCESSING OBJECT HOLDING DEVICE AND MICROFABRICATION APPARATUS PROVIDED WITH THE SAME, AND PROCESSING OBJECT FOR MICROFABRICATION

PROBLEM TO BE SOLVED: To provide a holding device for a processing object and a microfabrication apparatus provided with the same, and a processing object for microfabrication. SOLUTION: In the microfabrication apparatus for transferring a pattern of a mold 100 to the processing object 200 by pressi...

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Bibliographische Detailangaben
Hauptverfasser:	KANAI AKIHIKO, KUSUURA TAKAHISA
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a holding device for a processing object and a microfabrication apparatus provided with the same, and a processing object for microfabrication. SOLUTION: In the microfabrication apparatus for transferring a pattern of a mold 100 to the processing object 200 by pressing the mold 100 having a predetermined pattern to the object 200, the processing object holding device 12 for holding the processing object 200 is provided with a surface treating layer 122 comprising a material having a surface energy lower than that of Si such as a release agent or formed by an oxide film treatment or a nitride film treatment at the side holding the processing object 200. COPYRIGHT: (C)2008,JPO&INPIT