POSITIONING STAGE

PROBLEM TO BE SOLVED: To provide a positioning stage capable of correcting the slippage of a workpiece on an arm member even if the slippage of the workpiece in the horizontal θ direction occurs. SOLUTION: In the positioning stage, a pair of X-axis linear motors 31 and 32 for moving sliders in the X...

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Bibliographische Detailangaben
Hauptverfasser:	FUJII HIROTSUYO, SEKIJIMA SATOSHI, MORISADA TAISHIN
Format:	Patent
Sprache:	eng
Schlagworte:	COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a positioning stage capable of correcting the slippage of a workpiece on an arm member even if the slippage of the workpiece in the horizontal θ direction occurs. SOLUTION: In the positioning stage, a pair of X-axis linear motors 31 and 32 for moving sliders in the X-axis direction are arranged in parallel with each other and a Y-axis linear motor 300 is provided in a bridge member bridged between the sliders of the pair of X-axis linear motors 31 and 32 to perform predetermined treatment to the workpiece 2 by using a tool mounted to the slider of the Y-axis linear motor. The positioning stage is provided with a workpiece conveying means for moving the workpiece 2 in the X-axis direction, while supporting it, to deliver the workpiece 2 outside the stage, and the conveying means is provided with a turning means for turning the workpiece 2 in the horizontal θ direction. COPYRIGHT: (C)2008,JPO&INPIT