MOLD AND METHOD OF MANUFACTURING MOLD

PROBLEM TO BE SOLVED: To provide a low-cost and high-precision mold capable of forming a plurality of patterns at once, and a method of manufacturing the mold. SOLUTION: A first layer film 120 is formed on the surface of a substrate 110 and a second layer film 130 is formed on the surface of the fir...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KITADA MINORU, YUSA SATOSHI, ARITSUKA YUKI, ISHIKAWA MIKIO
Format: Patent
Sprache:eng
Schlagworte:
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