REACTOR AND MANUFACTURING METHOD FOR REACTOR
PROBLEM TO BE SOLVED: To provide a reactor capable of providing a thin membrane heater in a reaction vessel, and a manufacturing method for a reactor. SOLUTION: After heating wire patterns 91, 92 are formed on one surface of a substrate becoming a heater plate 62, an insulation film 94 covering the...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a reactor capable of providing a thin membrane heater in a reaction vessel, and a manufacturing method for a reactor. SOLUTION: After heating wire patterns 91, 92 are formed on one surface of a substrate becoming a heater plate 62, an insulation film 94 covering the heating wire patterns 91, 92 is formed and subsequently a partition plate 52 formed of winding through-holes 52b, 52c corresponding to the heating wire patterns 91, 92 is joined onto the heater plate 62. Thereafter, after reaction catalysts 56, 57 are formed in the through-holes 52b, 52c and on a surface of the insulation film 94, the reaction vessel is formed by joining the partition plate 52 and a lid plate 42. Thereby, the thin membrane heater by the heating wire patterns 91, 92 can be provided in the reaction vessel. COPYRIGHT: (C)2008,JPO&INPIT |
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