CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To prevent a charged particle beam from reaching an object to be irradiated during blanking due to scattering or the like. SOLUTION: The charged particle beam device is provided with an electron gun 1, a blanking signal making circuit 20 to make a blanking signal, a deflector 2 for blanking to deflect electron beam on the basis of the blanking signal, a slit 3 for blanking to block passing of the deflected electron beam through its opening, first and second shaping slits 5 and 6 which are arranged away from each other to shape the electron beam passing through the opening of the slit 3 for blanking, a forming deflector 8 arranged between the slits, and a fixed deflection data generator 31. During blanking off, the electron beam passing through the opening of the first shaping slit 5 is deflected by the forming deflector 8 on the basis of a beam shaping signal, so that the electron beam is allowed to pass through a desired part of the opening of the second shaping slit 6 and is directed to a material 10 to be drawn. During blanking off, a fixed deflection signal from the fixed deflection data generator 31 is supplied to the forming deflector 8. COPYRIGHT: (C)2008,JPO&INPIT