INSPECTION METHOD OF ION EXCHANGE RESIN OR ULTRAFILTRATION MEMBRANE

PROBLEM TO BE SOLVED: To provide an inspection method of an ion exchange resin or an ultrafiltration membrane capable of simply and rapidly judging the quality of the ion exchange resin or the ultrafiltration membrane immediately before delivery in a washing factory. SOLUTION: Ultrapure water, from which dissolved oxygen is removed, is supplied to and passed through a column filled with the ion exchange resin being a specimen or an ultrafiltration membrane filter device and column outflow water from the column is supplied to a wafer holder loaded with a first wafer to be brought into contact with the first wafer and the surface state of the first wafer after contact is measured while ultrapure water, from which dissolved oxygen is removed, is supplied to a wafer holder loaded with a second wafer without being passed through the resin column or the ultrafiltration membrane filter device to be brought into contact with the second wafer and the surface state of the second wafer after contact is measured and the measuring result of the first wafer is compared with that of the second wafer to judge the quality of the ion exchange resin or the ultrafiltration membrane as the specimen. COPYRIGHT: (C)2008,JPO&INPIT