METHOD FOR MEASURING TERMINAL HEIGHT OF ELECTRONIC COMPONENT
PROBLEM TO BE SOLVED: To provide a method for measuring a terminal height which measures a height of an electronic component even if a position of the electronic component is deviated in error. SOLUTION: In a method for measuring a terminal height of an electronic component 8 for measuring a height...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method for measuring a terminal height which measures a height of an electronic component even if a position of the electronic component is deviated in error. SOLUTION: In a method for measuring a terminal height of an electronic component 8 for measuring a height of a terminal 9 by a light section method, with a line beam scanning preformed by subjecting the electronic component 8 to pulse lighting by laser beam, a position of the terminal 9 of the electronic component 8 is obtained by continuous lighting of the laser beam, and a laser beam lighting positional correction is performed for measuring the terminal height from the position information thus obtained. COPYRIGHT: (C)2007,JPO&INPIT |
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