HEAT SHIELD PLATE FOR USE IN SUBSTRATE ANNEALING DEVICE

PROBLEM TO BE SOLVED: To provide a heat shield plate for use in a substrate annealing device which has small thermal deformation, does not oxidize (burn out) and can be enlarged in size and reduced in weight, even if one of its surfaces is exposed to a high temperature (around approx. 750°C for exam...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HASHIMOTO KOJI, MORITA MASARU, ISHIHARA TERUMASA, MIZUNO MASAYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FURNACES HEATING KILNS LIGHTING MECHANICAL ENGINEERING OVENS RETORTS SEMICONDUCTOR DEVICES WEAPONS
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