CARRIER DEVICE AND VACUUM PROCESSING DEVICE

CARRIER DEVICE AND VACUUM PROCESSING DEVICE

PROBLEM TO BE SOLVED: To simplify a carrier device used for an electron beam lithography device. SOLUTION: The carrier device 100 is structured by including: a multi-stage slider 50 equipped with a first slide table 53A and a second slide table 53B for mutually sliding in a horizontal direction; and...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: MURAYAMA NOBORU
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To simplify a carrier device used for an electron beam lithography device. SOLUTION: The carrier device 100 is structured by including: a multi-stage slider 50 equipped with a first slide table 53A and a second slide table 53B for mutually sliding in a horizontal direction; and lazy tongs 70 driving both the first slide table 53A and the second slide table 53B in an X-axis direction. Then, as the lazy tongs 70 are extended and contracted by a switching unit 60, the plurality of slide tables 53A, 53B are driven en bloc. With this, there is no more need of individually controlling the plurality of slide tables 53A, 5B, so that a driving mechanism of the carrier device 100 is simplified. COPYRIGHT: (C)2007,JPO&INPIT