APPARATUS AND METHOD FOR ANALYZING ACID CONCENTRATION IN MIXED ACID

PROBLEM TO BE SOLVED: To provide an analysis method capable of rapidly and precisely measuring a nitric acid concentration and a hydrofluoric acid concentration, even with respect to a mixed acid, such as an acid cleaning liquid or the like that contains metal ions. SOLUTION: The method for analyzin...

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Hauptverfasser:	KIKUYAMA MASATAKE, YASUHARA HISAO, MATSUSHIMA TOMOHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an analysis method capable of rapidly and precisely measuring a nitric acid concentration and a hydrofluoric acid concentration, even with respect to a mixed acid, such as an acid cleaning liquid or the like that contains metal ions. SOLUTION: The method for analyzing nitric acid concentration and hydrofluoric acid concentration uses an ion electrode method to analyze the mixed acid including nitric acid, hydrofluoric acid and the metal ions. An apparatus and the method for analyzing the nitric acid concentration and the hydrofluoric acid concentration in the mixed acid are characterized, in that a liquid prepared by removing the metal ions in the mixed acid is analyzed. Furthermore, the apparatus and the method for analyzing nitric acid concentration and hydrofluoric acid concentration in the mixed acid are characterized, in that an ion-exchange method, especially a Na +type positive ion-exchange resin is used to remove the metal ions in the mixed acid. COPYRIGHT: (C)2007,JPO&INPIT