ALUMINUM BASED ALLOY PREFORM, ALUMINUM BASED ALLOY DENSE BODY, METHOD FOR PRODUCING THEM AND SPUTTERING TARGET

PROBLEM TO BE SOLVED: To provide a technique, where the variation in the density of an aluminum based alloy preform by a spray forming process is reduced, and the preform can be produced in a high yield. SOLUTION: In the aluminum based alloy preform, the average of relative density is 50 to 65%, and...

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Hauptverfasser: YONEDA YOICHIRO, TOKUHIRA MASAYA
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creator YONEDA YOICHIRO
TOKUHIRA MASAYA
description PROBLEM TO BE SOLVED: To provide a technique, where the variation in the density of an aluminum based alloy preform by a spray forming process is reduced, and the preform can be produced in a high yield. SOLUTION: In the aluminum based alloy preform, the average of relative density is 50 to 65%, and the difference between the part showing the maximum value of the relative density and the part showing the minimum value of the relative density is ≤30%. The method for producing the preform includes: a stage where an aluminum based alloy is melted within the range of (liquidus temperature+100°C) to (liquidus temperature+400°C), so as to obtain the molten metal of the aluminum based alloy; a stage where the molten metal of the aluminum based alloy is subjected to gas atomizing under the conditions in which the gas/metal ratio is ≥4 Nm3/kg, and, provided that the angle made by the central axis of the confronted gas atomizing nozzle is defined as 2α, α satisfies 1 to 10°, so as to be atomized; and a stage where the atomized aluminum based alloy is deposited on a collector under the conditions in which spray distance is 700 to 1,200 mm and the collector angle is 20 to 45°, so as to obtain the preform. COPYRIGHT: (C)2007,JPO&INPIT
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SOLUTION: In the aluminum based alloy preform, the average of relative density is 50 to 65%, and the difference between the part showing the maximum value of the relative density and the part showing the minimum value of the relative density is ≤30%. The method for producing the preform includes: a stage where an aluminum based alloy is melted within the range of (liquidus temperature+100°C) to (liquidus temperature+400°C), so as to obtain the molten metal of the aluminum based alloy; a stage where the molten metal of the aluminum based alloy is subjected to gas atomizing under the conditions in which the gas/metal ratio is ≥4 Nm3/kg, and, provided that the angle made by the central axis of the confronted gas atomizing nozzle is defined as 2α, α satisfies 1 to 10°, so as to be atomized; and a stage where the atomized aluminum based alloy is deposited on a collector under the conditions in which spray distance is 700 to 1,200 mm and the collector angle is 20 to 45°, so as to obtain the preform. 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SOLUTION: In the aluminum based alloy preform, the average of relative density is 50 to 65%, and the difference between the part showing the maximum value of the relative density and the part showing the minimum value of the relative density is ≤30%. The method for producing the preform includes: a stage where an aluminum based alloy is melted within the range of (liquidus temperature+100°C) to (liquidus temperature+400°C), so as to obtain the molten metal of the aluminum based alloy; a stage where the molten metal of the aluminum based alloy is subjected to gas atomizing under the conditions in which the gas/metal ratio is ≥4 Nm3/kg, and, provided that the angle made by the central axis of the confronted gas atomizing nozzle is defined as 2α, α satisfies 1 to 10°, so as to be atomized; and a stage where the atomized aluminum based alloy is deposited on a collector under the conditions in which spray distance is 700 to 1,200 mm and the collector angle is 20 to 45°, so as to obtain the preform. 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SOLUTION: In the aluminum based alloy preform, the average of relative density is 50 to 65%, and the difference between the part showing the maximum value of the relative density and the part showing the minimum value of the relative density is ≤30%. The method for producing the preform includes: a stage where an aluminum based alloy is melted within the range of (liquidus temperature+100°C) to (liquidus temperature+400°C), so as to obtain the molten metal of the aluminum based alloy; a stage where the molten metal of the aluminum based alloy is subjected to gas atomizing under the conditions in which the gas/metal ratio is ≥4 Nm3/kg, and, provided that the angle made by the central axis of the confronted gas atomizing nozzle is defined as 2α, α satisfies 1 to 10°, so as to be atomized; and a stage where the atomized aluminum based alloy is deposited on a collector under the conditions in which spray distance is 700 to 1,200 mm and the collector angle is 20 to 45°, so as to obtain the preform. COPYRIGHT: (C)2007,JPO&amp;INPIT</abstract><oa>free_for_read</oa></addata></record>
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recordid cdi_epo_espacenet_JP2007247006A
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subjects ALLOYS
CASTING
CASTING OF METALS
CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
FERROUS OR NON-FERROUS ALLOYS
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
MAKING METALLIC POWDER
MANUFACTURE OF ARTICLES FROM METALLIC POWDER
METALLURGY
PERFORMING OPERATIONS
POWDER METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
TRANSPORTING
TREATMENT OF ALLOYS OR NON-FERROUS METALS
WORKING METALLIC POWDER
title ALUMINUM BASED ALLOY PREFORM, ALUMINUM BASED ALLOY DENSE BODY, METHOD FOR PRODUCING THEM AND SPUTTERING TARGET
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