ALUMINUM BASED ALLOY PREFORM, ALUMINUM BASED ALLOY DENSE BODY, METHOD FOR PRODUCING THEM AND SPUTTERING TARGET

PROBLEM TO BE SOLVED: To provide a technique, where the variation in the density of an aluminum based alloy preform by a spray forming process is reduced, and the preform can be produced in a high yield. SOLUTION: In the aluminum based alloy preform, the average of relative density is 50 to 65%, and the difference between the part showing the maximum value of the relative density and the part showing the minimum value of the relative density is ≤30%. The method for producing the preform includes: a stage where an aluminum based alloy is melted within the range of (liquidus temperature+100°C) to (liquidus temperature+400°C), so as to obtain the molten metal of the aluminum based alloy; a stage where the molten metal of the aluminum based alloy is subjected to gas atomizing under the conditions in which the gas/metal ratio is ≥4 Nm3/kg, and, provided that the angle made by the central axis of the confronted gas atomizing nozzle is defined as 2α, α satisfies 1 to 10°, so as to be atomized; and a stage where the atomized aluminum based alloy is deposited on a collector under the conditions in which spray distance is 700 to 1,200 mm and the collector angle is 20 to 45°, so as to obtain the preform. COPYRIGHT: (C)2007,JPO&INPIT