VACUUM APPARATUS HAVING RECIPROCATING MECHANISM

PROBLEM TO BE SOLVED: To provide a vacuum apparatus having a reciprocating mechanism with a simple structure capable of positioning an object in a vacuum chamber with high accuracy by reducing an adverse effect of thermal elongation in a drive shaft for retaining the object in the vacuum chamber. SO...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KANEKO MOTOSADA, NAKAMURA TETSURO, OHASHI YUJIRO, SAGAWA NORIMOTO, MAKIMURA SHUNSUKE
Format:	Patent
Sprache:	eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUSION REACTORS GAMMA RAY OR X-RAY MICROSCOPES HAND TOOLS IRRADIATION DEVICES MANIPULATORS NUCLEAR ENGINEERING NUCLEAR PHYSICS PERFORMING OPERATIONS PHYSICS PLASMA TECHNIQUE PORTABLE POWER-DRIVEN TOOLS PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a vacuum apparatus having a reciprocating mechanism with a simple structure capable of positioning an object in a vacuum chamber with high accuracy by reducing an adverse effect of thermal elongation in a drive shaft for retaining the object in the vacuum chamber. SOLUTION: This vacuum apparatus having a reciprocating mechanism is provided with: a space section formed facing the drive shaft 6 inside a shield body 3; a guiding device 7 disposed in the space section for guiding movement of the drive shaft; and a mechanical stopper 69 installed in the guiding device for stopping the movement of the drive shaft. COPYRIGHT: (C)2007,JPO&INPIT