SUBSTRATE STICKING DEVICE

PROBLEM TO BE SOLVED: To provide a substrate sticking device by which laminating of a substrate in a vacuum is performed with high accuracy. SOLUTION: The substrate laminating device is constituted by providing: a first chamber having a movable carriage which linearly moves for carrying upper and lower substrates in a second chamber, respectively; an upper table which receives an upper substrate from a medium vacuum state to a high vacuum state and holds it and a lower table which receives a lower substrate at the same medium vacuum state to the high vacuum sate and holds it; second chamber which moves either table in the horizontal direction, positions two upper and lower substrates, operates either of the upper and lower tables and laminating is performed by narrowing down substrate gaps at the high vacuum state and a third chamber having a movable carriage which linearly moves the laminated substrates from the second chamber to carry out the laminated substrates at the medium vacuum state to the high vacuum state and carries the stuck substrates out to outdoors at an atmospheric state at the medium vacuum state to the high vacuum state. COPYRIGHT: (C)2007,JPO&INPIT