ANTIFREEZING DEVICE FOR VACUUM LINE, POLISHING DEVICE USING THE SAME, AND DEVICE MANUFACTURING METHOD USING THE SAME

PROBLEM TO BE SOLVED: To provide an antifreezing device for a vacuum line capable of preventing the vacuum line from freezing with a simple configuration. SOLUTION: A pure water supply source 42 is connected to a pure water supply line 41 which is branched from a vacuum line 32, extended and provide...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	EZAKI MORIHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an antifreezing device for a vacuum line capable of preventing the vacuum line from freezing with a simple configuration. SOLUTION: A pure water supply source 42 is connected to a pure water supply line 41 which is branched from a vacuum line 32, extended and provided. The temperature of the inside of the vacuum line 32 can be maintained to approximately same degree as the pure water by supplying the pure water from the pure water supply source 42 into the vacuum line 32 through the pure water supply line 41, and generation of freezing can be prevented in the vacuum line 32 thereby. COPYRIGHT: (C)2007,JPO&INPIT