OPTICAL ANISOTROPIC PARAMETER MEASURING METHOD AND MEASURING INSTRUMENT

PROBLEM TO BE SOLVED: To provide a method and instrument for measuring the direction of an optical axis of an optical anisotropic thin film, and its size and film thickness at a high speed with high accuracy, and further, performing distribution measurement by means of a two-dimensional light receiving element. SOLUTION: While a turn table 6 mounted with light emitting and light receiving optical systems 4 and 5 is turned centering on a normal line R set up at a measurement point M, monochromatic light of P polarization is applied thereto at prescribed incident angles in a plurality of incident directions set at prescribed angular intervals to detect the intensity of reflected light of S polarization included in reflected light of the monochromatic light. An azimuthal angle direction ΦAof an optical axis OX at the measurement point M is determined based on an incident direction ν1in which a local minimum value V1is measured, with the minimum value V1interposed between two local maximum values Λ1and Λ2being maximum peaks among incident directions in which the reflected light intensity shows local minimum values. A polar angle direction θ can be determined, based on an incident direction in which a local minimum value V3is measured, with the minimum value V3interposed between the local maximum value Λ1being a maximum peak and a local maximum value Λ3being an intermediate peak adjoining thereto. COPYRIGHT: (C)2007,JPO&INPIT