SAMPLE EVALUATION DEVICE AND METHOD

PROBLEM TO BE SOLVED: To evaluate the device sample formed into a thin film in a transmission electron microscope by applying voltage to the device sample to turn the device sample ready to operate. SOLUTION: A plurality of probes are provided in a focused ion beam device and voltage is freely applied across the probes. Further, a detector for measuring the current between the probes to determine the presence of the current is provide. The probes are brought into contact with the contact plug of a semiconductor device, a deposition gas is introduced into the device, the contact position of the probes is irradiated with a focused ion beam to bond the probes to the contact plug to form a current introducing terminal. The current introducing mechanism brought into contact with the current introducing terminal to apply voltage to the current introducing terminal from outside of the electron microscope is provided to the sample holder of the electron microscope. COPYRIGHT: (C)2007,JPO&INPIT