CHEMICAL VAPOR DEPOSITION APPARATUS

PROBLEM TO BE SOLVED: To provide chemical vapor deposition apparatus and a method of using the apparatus. SOLUTION: The chemical vapor deposition apparatus 10 comprises a heating element capable of emitting electromagnetic radiation; a retort 16 positioned relative to the heating element to receive...

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Bibliographische Detailangaben
Hauptverfasser:	WEAVER SCOTT ANDREW, RUCKER MICHAEL H, LOU VICTOR LIENKONG, LEWIS DANIEL JOSEPH, DALAKOS GEORGE THEODORE, SAYLOR MATTHEW DAVID
Format:	Patent
Sprache:	eng
Schlagworte:	AIR INTAKES FOR JET-PROPULSION PLANTS BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMBUSTION ENGINES CONTROLLING FUEL SUPPLY IN AIR-BREATHING JET-PROPULSION PLANTS DIFFUSION TREATMENT OF METALLIC MATERIAL ENGINE PLANTS IN GENERAL GAS-TURBINE PLANTS HEATING HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MACHINES OR ENGINES IN GENERAL MECHANICAL ENGINEERING METALLURGY NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAMTURBINES STEAM ENGINES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide chemical vapor deposition apparatus and a method of using the apparatus. SOLUTION: The chemical vapor deposition apparatus 10 comprises a heating element capable of emitting electromagnetic radiation; a retort 16 positioned relative to the heating element to receive the electromagnetic radiation; an encasing member 18 at least partially disposed around the retort 16, the encasing member comprising a material that is at least partially transparent to the electromagnetic radiation; a plenum defined at least in part by an inner surface 24 of the encasing member 18 and an outer surface 22 of the retort 16; and a furnace box 14 at least partially disposed around the encasing member 18 and the retort 16, and housing the heating element. COPYRIGHT: (C)2007,JPO&INPIT