VERTICAL CONVEYANCE DEVICE
PROBLEM TO BE SOLVED: To utilize a clean room space effectively and convey an object to be conveyed smoothly and safely. SOLUTION: A carousel type lifter 5 is composed of a chain means 2 composed of two chain units 4a, 4b having the same configuration and a conveyance base 17, a transfer arm 107 pro...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To utilize a clean room space effectively and convey an object to be conveyed smoothly and safely. SOLUTION: A carousel type lifter 5 is composed of a chain means 2 composed of two chain units 4a, 4b having the same configuration and a conveyance base 17, a transfer arm 107 provided in a carrying-in port 105 and a carrying-out port 106 to carry an FOUP 10 into/out of the conveyance base 17, and a lifter cover 108. The chain units 4a, 4b are composed of one set of chain modules 6a and 6b, 6c and 6d having the same configuration and arranged by deviating in parallel. Both ends of the conveyance base 17 are supported so as to turnable on a front connection member and a rear connection member supported so as to turnable on a front link and a rear link provided on chains 21a and 21b, 22a and 22b suspended on a sprocket. COPYRIGHT: (C)2007,JPO&INPIT |
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