METHOD OF MONITORING STATE OF DETECTOR, AND EXPOSURE APPARATUS

METHOD OF MONITORING STATE OF DETECTOR, AND EXPOSURE APPARATUS

PROBLEM TO BE SOLVED: To properly detect and monitor the state of deterioration of an alignment sensor. SOLUTION: An imaging element detects a predetermined reference mark at a reference time point where an apparatus initially starts operation to acquire a reference signal (S11), and the imaging ele...

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Bibliographische Detailangaben
Hauptverfasser: MORITA SHINKO, KAMITAKE TAKAHIRO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:PROBLEM TO BE SOLVED: To properly detect and monitor the state of deterioration of an alignment sensor. SOLUTION: An imaging element detects a predetermined reference mark at a reference time point where an apparatus initially starts operation to acquire a reference signal (S11), and the imaging element detects this reference mark at a necessary monitoring time point while operating the apparatus after the reference time point to acquire a comparing signal (S14). The reference signal is compared with a comparing signal, and the state of the alignment sensor is determined on the basis of a result of comparison (S16). COPYRIGHT: (C)2007,JPO&INPIT