SEPARATION APPARATUS AND METHOD OF SAMPLE, AND COMPOUND MEMBER

SEPARATION APPARATUS AND METHOD OF SAMPLE, AND COMPOUND MEMBER

PROBLEM TO BE SOLVED: To provide a treatment method without any deterioration of quality in a sample in the process by achieving treatment without giving large pressure due to the collapse of cavitation to the sample in the separation process of the sample, such as a laminated substrate. SOLUTION: A...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: YANAGIDA KAZUTAKA
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a treatment method without any deterioration of quality in a sample in the process by achieving treatment without giving large pressure due to the collapse of cavitation to the sample in the separation process of the sample, such as a laminated substrate. SOLUTION: A separation apparatus comprises a holder for holding the sample, a nozzle 1032 for jetting out liquid toward the separation layer of the sample held by the holder, and a mechanism that has a liquid supply for supplying the liquid to the nozzle and dissolves gas into the liquid at the liquid supply. COPYRIGHT: (C)2007,JPO&INPIT