MULTILAYER-FILM REFLECTOR, METHOD FOR REGENERATING SAME, AND EXPOSURE APPARATUS

PROBLEM TO BE SOLVED: To provide a multilayer-film reflector capable of removing a multilayer film from a substrate without spending time and costs and regenerating a new multilayer film, and achieving a desired reflection factor. SOLUTION: The multilayer-film reflector comprises a multilayer film 103 in which a pair of layers 105 comprising a layer containing molybdenum and that containing silicon are piled up on a substrate 101. A film is formed so that a layer 107 containing molybdenum in at least a pair of partial layers is laminated wider than a layer containing silicon at a region including the layer containing silicon in the pair of layers and the periphery. When dissolving the multilayer film for peeling from the substrate, a layer containing molybdenum around the pair of layers is dissolved first, and then a layer containing molybdenum in the pair of layers continuous to the layer containing molybdenum around the pair of layers is dissolved, thus dissolving and peeling the entire multilayer film. COPYRIGHT: (C)2007,JPO&INPIT