OZONE GAS TRANSFER DEVICE

PROBLEM TO BE SOLVED: To provide an ozone gas transfer device free from possibility of breakage of the device even if ozone should decompose in piping. SOLUTION: A plurality of filters 5 are provided as separated from one another along piping 4 as well as a pressure reducing means 6 is provided between the filters 5 and 5 in the piping 4. Even if an ozone gas containing ozone by 10% or more in a volume ratio should decompose in between the filters 5 and 5 in the piping 4, increase in the pressure due to the decomposition of ozone can be reduced by the action of the pressure reducing means 6, heat generating from ozone decomposition is immediately absorbed by heat capacitance of the filter 5 having a large number of pores (with a high pressure loss) and an extremely high heat transfer rate, and a gas at high temperature is prevented from flowing into the adjacent region of the region between filters 5 and 5 within the piping so as to suppress a ozone decomposition chain. COPYRIGHT: (C)2007,JPO&INPIT