THIN FILM ACOUSTIC RESONATOR, FILTER, AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To realize a thin film acoustic resonator in which a resonance frequency can be accurately and uniformly adjusted. SOLUTION: The thin film acoustic resonator is equipped with a piezoelectric film 11, and a first electrode 12 and a second electrode 13 which are formed confrontin...

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Bibliographische Detailangaben
Hauptverfasser:	TSURUMI NAOHIRO, HACHIMAN KAZUHIRO, SAKAI HIROYUKI, UNO TAKASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To realize a thin film acoustic resonator in which a resonance frequency can be accurately and uniformly adjusted. SOLUTION: The thin film acoustic resonator is equipped with a piezoelectric film 11, and a first electrode 12 and a second electrode 13 which are formed confronting each other through the piezoelectric film 11. A resonance frequency adjusting film 14 which is formed of material 500 to 3,500 kg/m3in density is provided on the side of the first electrode 12 or the second electrode 13 opposite to its other side facing the piezoelectric film 11. COPYRIGHT: (C)2007,JPO&INPIT