HEAT TREATMENT METHOD, HEAT TREATMENT APPARATUS, AND VAPORIZER

PROBLEM TO BE SOLVED: To provide a heat treatment method and equipment which can reduce the number of particles generated on a heat-treated substrate when water vapor is supplied to the substrate to perform heat treatment. SOLUTION: A vaporizer for supplying water vapor into a heating furnace 1 perf...

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Bibliographische Detailangaben

Hauptverfasser:	OKURA NARIYUKI, OKABE YASUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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