SOLID PHOTOGRAPHING ELEMENT, AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To make each charge transferring portion of a solid photographing element fine and thin without generating such characteristic degradations as the reduction of its transferring efficiency, the reduction of its charge drawing-out characteristic, its DC short, or its field concentration. SOLUTION: The photographing element has photoelectric converters and charge transfers each of which has charge transferring electrodes for transferring the charges generated in the photoelectric conversion portions. Each charge transfer comprises the charge transferring electrodes. Each of the electrodes has a first-layer electrode made of a first-layer conductive film, and a second-layer electrode comprising a second-layer conductive film which is contacted with the first-layer electrode via an inter-electrode insulating film. Further, in this photoelectric element, the inter-electrode insulating film comprises a radical oxide film formed by using a low-temperature plasma. COPYRIGHT: (C)2007,JPO&INPIT