SHEETLIKE PROBE AND ITS PRODUCING METHOD

PROBLEM TO BE SOLVED: To provide a sheetlike probe maintained by stabilizing in a successful connection state in which a stable connection state is attained by a circuit device in an electrode pitch minutely and infinitesimally, an electrode structure does not drop out of an insulator layer, but high durability is acquired, and indeed inhibition of the misregistration of the electrode structure and inspected electrode by a temperature change is performed in a burn-in-test to the circuit device with the small wafer of the large area and pitch of the inspected electrode and to provide its producing method. SOLUTION: The sheetlike probe of this invention has supports which support an insulation film and this for a plurality of electrode structures extended in the thickness direction. The electrode structure has a front electrode part which projects from the front of the insulated layer, a rear electrode part exposed to the rear of the insulating layer and is partially embedded in the insulating film, and a short circuit portion extended in the thickness direction of a base end sequentially or in series insulation layer of the front electrode part and connected with the rear surface electrode part. COPYRIGHT: (C)2007,JPO&INPIT